Defects formation mechanism and control of SiC coatings by chemical vapor deposition

Kuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society

Volumn 33, Issue 4, 2005, Pages 443-446

  Wu, Shoujun ^a   Cheng, Laifei ^a   Zhang, Litong ^a   Xu, Yongdong ^a   Shen, Jixiong ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Defects control; Formation mechanism; Silicon carbide coating

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; DEFECTS; OXIDATION RESISTANCE; SCANNING ELECTRON MICROSCOPY;

ANTIOXIDATION COATING; DEFECTS CONTROL; FORMATION MECHANISM; SILICON CARBIDE COATING;

SILICON CARBIDE;

EID: 19044379351     PISSN: 04545648     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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