Micromachined sensors using polysilicon sacrificial layer etching technology

Sensors and Materials

Volumn 8, Issue 1, 1996, Pages 057-067

  Tabata, Osamu ^a   Shimaoka, Keiichi ^a   Asahi, Ryouji ^a   Sugiyama, Susumu ^b  

^a Rd Management Section   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Actuator; Infrared sensor; Integrated sensor; Micromachined sensor; Optical chopper; Polysilicon; Preassembly; Pressure sensor; Sacrificial layer etching; Silicon sensor

Indexed keywords

EID: 19044367783     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

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