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Volumn , Issue 291 SUPPL.2, 1999, Pages 46-50
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Optimum operating conditions leading to complete sterilization at low substrate temperatures in a plasma flowing afterglow
a a b b b c d d e e f a |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 18944406139
PISSN: 12660167
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (3)
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References (7)
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