Intrinsic stress origin in high quality CVD diamond films

Physica Status Solidi (A) Applied Research

Volumn 174, Issue 1, 1999, Pages 11-18

  Vlasov, I ^a   Ralchenko, V ^a   Zakharov, D ^b   Zakharov, N ^b,c  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^c MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18944386485     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199907)174:1<11::AID-PSSA11>3.0.CO;2-T     Document Type: Article

References (14)

1. D. SCHWARZBACH, R. HAUBNER, and B. LUX, Diamond Relat. Mater. 3, 757 (1994).
2. N. C. BURTON, J. W. STEEDS, G. M. MEADEN, Y. G. SHRETER, and J. E. BUTLER, Diamond Relat. Mater. 4, 1222 (1995).
3. D. RATS, L. BIMBAULT, L. VANDENBULCKE, R. HERBIN, and K. F. BADAWI, J. Appl. Phys. 78, 4994 (1995).
4. Y. VON KAENEL, J. STIEGLER, J. MICHLER, and E. BLANK, J. Appl. Phys. 81, 1726 (1997).
5. S. SALVATORI, M. C. ROSSI, F. GALLUZZI, F. SOMMA, and R. M. MONTEREALLI, Proc. SPIE 3484, 93 (1997).
6. J. L. W. STEEDS, A. GILMORE, J. A. WILSON, and J. E. BUTLER, Diamond Relat. Mater 7 1437 (1998).
7. I. I. VLASOV, V. G. RALCHENKO, E. D. OBRAZTSOVA, A. A. SMOLIN, and V. I. KONOV, Thin Solid Films 308/309, 168 (1997).
8. I. I. VLASOV and V. G. RALCHENKO, Proc. SPIE 3484, 103 (1997).
9. J. MICHLER, J. STIEGLER, Y. VON KAENEL, P. MOECKLI, W. DORSCH, D. STENKAMP, and E. BLANK, J. Crystal Growth 172, 404 (1997)
10. T. R. ANTHONY and Y. MENG, Diamond Relat. Mater. 6, 120 (1997).
11. X. JIANG and C. L. JIA, Appl. Phys. Lett. 69, 3902 (1996).
12. C. KITTEL, Introduction to Solid State Physics, Izd. Nauka, Moscow 1978 (in Russian, p. 701).
13. K. VAINSHTEIN, V. M. FRIDKIN, and V. L. INDENBOM, Modern Crystallography, Vol. II, Izd. Nauka, Moscow 1979 (in Russian, p. 318-325).
14. M. H. GRIMSDITCH and A. K. RAMDAS, Phys. Rev. B 11, 3139 (1975).