Deposition and properties of SiC thin films in single and multilayer coatings

Vide: Science, Technique et Applications

Volumn , Issue 291 SUPPL.2, 1999, Pages 151-153

  Leiste, H ^a   Dambacher, U ^a   Ulrich, S ^a   Stuber M ^a   Holleck, H ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Multilayer; SiC; Thin films; Wear resistance

Indexed keywords

EID: 18944377954     PISSN: 12660167     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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