Growth and characterization of SiC/SiNx/Si structures

Journal of the Electrochemical Society

Volumn 148, Issue 3, 2001, Pages

  Nahm, Kee Suk ^a   Kim, Kwang Chul ^a   Lim, Kee Young ^a  

^a Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18844402127     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1346620     Document Type: Article

References (3)

1. S. Nishino, H. Suhara, H. Ono, and H. Matsunami, J. Appl. Phys., 61, 4889 (1987).
2. P. Liaw and R. F. Davis, J. Electrochem. Soc., 132, 642 (1985).
3. A. J. Steckl, C. Yuan, Q.-Y. Tong, U. Gösele, and M. J. Loboda, J. Electrochem. Soc.. 1-11, L66 (1994).