Grid-Based Simulation of Industrial Thin-Film Production

Simulation

Volumn 81, Issue 1, 2005, Pages 77-85

  Krzhizhanovskaya, V V ^a   Sloot, P M A ^a   Gorbachev, Yu E ^b  

^a UNIVERSITY OF AMSTERDAM   (Netherlands)

^b PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

Grid; HLA; PECVD; problem solving environment; Thin film semiconductors

Indexed keywords

COMPUTER ARCHITECTURE; DISTRIBUTED COMPUTER SYSTEMS; GRAPHICAL USER INTERFACES; INTERACTIVE COMPUTER SYSTEMS; INTEROPERABILITY; MATHEMATICAL MODELS; NUMERICAL METHODS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROBLEM SOLVING; THIN FILMS; VIRTUAL REALITY;

GRID COMPUTING; HIGH LEVEL ARCHITECTURE; PROBLEM SOLVING ENVIRONMENT; THIN FILM SEMICONDUCTORS;

COMPUTER SIMULATION;

EID: 18844398574     PISSN: 00375497     EISSN: None     Source Type: Journal    
DOI: 10.1177/0037549705051972     Document Type: Article

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