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Volumn 33, Issue 2 I, 2005, Pages 340-341
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Microwave plasma system for material processing
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Author keywords
Cavity resonator; Ceramics; Frequency; Material processing; Microwave plasma
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Indexed keywords
ATMOSPHERIC PRESSURE;
CAVITY RESONATORS;
CERAMIC FIBERS;
ELECTRIC FIELD EFFECTS;
GASES;
MICROWAVES;
MIXTURES;
PLASMA FILLED WAVEGUIDES;
PLASMA JETS;
PROCESSING;
GAS MIXTURES;
MATERIAL PROCESSING;
MICROWAVE PLASMA JET;
MICROWAVE PLASMA SYSTEM;
WAVEGUIDE BASED APPLICATOR;
PLASMA APPLICATIONS;
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EID: 18844394514
PISSN: 00933813
EISSN: None
Source Type: Journal
DOI: 10.1109/TPS.2005.845005 Document Type: Article |
Times cited : (21)
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References (7)
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