Preparation of uniaxially grown AlN thin films by RF sputtering

Journal of the Korean Physical Society

Volumn 30, Issue SUPPL. PART 1, 1997, Pages

  Chung, Sung Boon ^a   Song, Bok Sik ^a   Hong, Pil Young ^a   Moon, Dong Chan ^a   Kim, Seon Tai ^b  

^a Kwangwoon University   (South Korea)

^b Daejon National University of Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18844386798     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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