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Volumn 37, Issue 23, 1998, Pages 5394-5398

Pattern generation with an extended focal depth

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Indexed keywords


EID: 18844376337     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.005394     Document Type: Article
Times cited : (8)

References (11)
  • 2
    • 0020249292 scopus 로고
    • Improving resolution in photolithography with a phase-shifting mask
    • M. D. Levenson, N. S. Viswanathan, and R. A. Simpson, “Improving resolution in photolithography with a phase-shifting mask, ” IEEE Trans. Electron. Devices ED-29, 1828-1836 (1982).
    • (1982) IEEE Trans. Electron. Devices , vol.ED-29 , pp. 1828-1836
    • Levenson, M.D.1    Viswanathan, N.S.2    Simpson, R.A.3
  • 3
    • 0001328479 scopus 로고
    • Spatial filtering for depth of focus and resolution enhancement
    • H. Fukuda, T. Terasawa, and S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement, ” J. Vac. Sci. Tech-nol. B 9, 3113-3116 (1991).
    • (1991) J. Vac. Sci. Tech-Nol. B , vol.9 , pp. 3113-3116
    • Fukuda, H.1    Terasawa, T.2    Okazaki, S.3
  • 4
    • 0040045841 scopus 로고
    • Optimization of partially coherent optical system for optical lithography
    • S. Inoue, T. Fujisawa, S. Tamaushi, and Y. Ogawa, “Optimization of partially coherent optical system for optical lithography, ” J. Vac. Sci. Technol. B 10, 3004-3007 (1992).
    • (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 3004-3007
    • Inoue, S.1    Fujisawa, T.2    Tamaushi, S.3    Ogawa, Y.4
  • 5
    • 0028459575 scopus 로고
    • Control of wave-front propagation with diffractive elements
    • R. Piestun and J. Shamir, “Control of wave-front propagation with diffractive elements, ” Opt. Lett. 19, 771-773 (1994).
    • (1994) Opt. Lett. , vol.19 , pp. 771-773
    • Piestun, R.1    Shamir, J.2
  • 6
    • 84975575186 scopus 로고
    • Nondiffracting images under coherent illumination
    • B. Salik, J. Rosen, and A. Yariv, “Nondiffracting images under coherent illumination, ” Opt. Lett. 17, 1743-1745 (1995).
    • (1995) Opt. Lett. , vol.17 , pp. 1743-1745
    • Salik, B.1    Rosen, J.2    Yariv, A.3
  • 7
    • 85010158546 scopus 로고
    • Speckle-free reconstruction in digital holography
    • F. Wyrowski and O. Bryngdahl, “Speckle-free reconstruction in digital holography, ” J. Opt. Soc. Am. A 2, 693-697 (1985).
    • (1985) J. Opt. Soc. Am. A , vol.2 , pp. 693-697
    • Wyrowski, F.1    Bryngdahl, O.2
  • 8
    • 0030243536 scopus 로고    scopus 로고
    • Wave fields in three dimensions: Analysis and synthesis
    • references therein
    • See, for example, R. Piestun, B. Spektor, and J. Shamir, “Wave fields in three dimensions: analysis and synthesis, ” J. Opt. Soc. Am. A 13, 1837-1848 (1996), and references therein.
    • (1996) J. Opt. Soc. Am. A , vol.13 , pp. 1837-1848
    • Piestun, R.1    Spektor, B.2    Shamir, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.