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Volumn 11, Issue 6, 2005, Pages 452-455
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Design, simulation, fabrication, and characterization of a PMMA tunneling sensor based on hot embossing technique
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Author keywords
[No Author keywords available]
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Indexed keywords
BIOCOMPATIBILITY;
COMPUTER SIMULATION;
ELECTRIC CURRENTS;
ELECTRON TUNNELING;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
NATURAL FREQUENCIES;
POLYMETHYL METHACRYLATES;
SILICON;
TRANSDUCERS;
ELECTRON TUNNELING TRANSDUCERS;
METLAB SIMULINK;
STRUCTURE PARAMETERS;
TUNNELING CURRENT;
MICROSENSORS;
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EID: 18744395805
PISSN: 09467076
EISSN: None
Source Type: Journal
DOI: 10.1007/s00542-004-0490-4 Document Type: Article |
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Times cited : (5)
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References (0)
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