Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip

Microsystem Technologies

Volumn 11, Issue 6, 2005, Pages 416-423

  Lee, S H ^a   Lee, S S ^b   Choi, J J ^c   Jeon, J U ^d   Ro, K ^e  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c iCurie Lab   (South Korea)

^d University of Ulsan   (South Korea)

^e Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ETCHING; FERROELECTRIC MATERIALS; FERROELECTRICITY; MAGNETIC DISK STORAGE; MICROELECTROMECHANICAL DEVICES; SCANNING TUNNELING MICROSCOPY; SUPERPARAMAGNETISM; ZINC OXIDE;

ANODIC BONDING PROCESSES; ELECTRICAL SIGNALS; MAGNETIC FORCE MICROSCOPY (MFM); POLARIZED FERROELECTRIC DOMAINS;

PIEZOELECTRIC MATERIALS;

EID: 18744372763     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0494-0     Document Type: Article

References (0)