Dielectric properties of fluorocarbon thin films deposited by radio frequency sputtering of polytetrafluoroethylene

Journal of Applied Physics

Volumn 92, Issue 8, 2002, Pages 4584-4589

  Gonon, P ^a   Sylvestre, A ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND LOSS; C-F BONDS; DEBYE MODELS; FLUOROCARBON THIN FILMS; FREQUENCY RANGES; FUNCTION OF FREQUENCY; HIGH FREQUENCY HF; INFRARED FREQUENCIES; LINEAR VARIATION; LOSS FACTOR; OPTICAL FREQUENCY; POLYTETRAFLUROETHYLENE; RADIO FREQUENCY SPUTTERING; RADIO-FREQUENCY-MAGNETRON SPUTTERING; ROOM TEMPERATURE; TEMPERATURE DEPENDENCE; VERY LOW FREQUENCY;

ACTIVATION ENERGY; TEMPERATURE DISTRIBUTION;

DIELECTRIC PROPERTIES;

EID: 18744366027     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1505983     Document Type: Article

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