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Volumn 11, Issue 12, 1999, Pages 3687-3692

Synthesis and photoimaging study of a new poly(methacrylate) with tethered silacyclobutane moiety

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Indexed keywords


EID: 18644382052     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm990519y     Document Type: Article
Times cited : (5)

References (29)
  • 5
    • 0004250770 scopus 로고
    • Selegny, E., Ed.; Reidel: Dordrecht, Netherlands
    • Williams, J. L. R. In Polyelectrolytes; Selegny, E., Ed.; Reidel: Dordrecht, Netherlands, 1974.
    • (1974) Polyelectrolytes
    • Williams, J.L.R.1
  • 16
    • 80051477466 scopus 로고
    • U.S. Patent 3, 587, 995
    • Jonas, D. A.; Owen, W. J. U.S. Patent 3,587,995, 1972.
    • (1972)
    • Jonas, D.A.1    Owen, W.J.2
  • 17
    • 80051476441 scopus 로고
    • U.S. Patent 3, 694, 427
    • Jonas, D. A.; Owen, W. J. U.S. Patent 3,694,427, 1972.
    • (1972)
    • Jonas, D.A.1    Owen, W.J.2
  • 18
    • 80051476001 scopus 로고
    • U.S. Patent 4, 774, 312
    • Burns, G. T. U.S. Patent 4,774,312, 1988.
    • (1988)
    • Burns, G.T.1
  • 29
    • 0003576957 scopus 로고
    • Introduction to microlithography
    • 2nd ed.; Thompson, L. F., Willson, C. G., Bowden, M. J., Ed.; American Chemical Society: Washington, DC
    • Thompson, L. F. In Introduction to Microlithography, 2nd ed.; Thompson, L. F., Willson, C. G., Bowden, M. J., Ed.; ACS Professional Reference Book; American Chemical Society: Washington, DC, 1994; pp 326-327.
    • (1994) ACS Professional Reference Book , pp. 326-327
    • Thompson, L.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.