Nano-scratch testing on thin diamond-like carbon coatings for microactuators: Friction, wear and elastic-plastic deformation

Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 95, Issue 5, 2004, Pages 306-310

  Küster, Rolf L A ^a   Schiffmann, Kirsten I ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Elastic deformation; MEMS; Microelectromechanical systems; Nanofriction; Nanoindentation; Nanoscratch; Nanowear; Plastic deformation

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; HARDNESS; INDENTATION; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OPTIMIZATION; PLASTIC DEFORMATION;

ELASTIC DEFORMATION; NANOFRICTION; NANOINDENTATION; NANOSCRATCH; NANOWEAR;

COATINGS;

EID: 18544408132     PISSN: 00443093     EISSN: None     Source Type: Journal    
DOI: 10.3139/146.017953     Document Type: Conference Paper

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