Temperature dependent emissivity of multilayers on silicon

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 69-79

  Abedrabbo, S ^a   Ravindra, N M ^a   Chen, W ^a   Rajasekhar, V ^a   Golota, T ^a   Gokce, O H ^a   Fiory, A T ^a   Nguyenphu, B ^a   Nanda, A ^a   Speranza, T ^a   Maszara, W ^a   Williamson, G ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED SPECTROSCOPY; LIGHT EMISSION; MATHEMATICAL MODELS; OPTICAL VARIABLES MEASUREMENT; OXYGEN; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICA; THERMAL EFFECTS;

FIORY MODEL; SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

MULTILAYERS;

EID: 18544403844     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-69     Document Type: Conference Paper

References (9)