Self-assembled impurity superlattices and microcavities in silicon

Defect and Diffusion Forum

Volumn , Issue 194-199 PART 1, 2001, Pages 673-678

  Bagraev, N ^a   Bouravleuv, A ^a   Gehlhoff, W ^b   Klyachkin, L ^a   Malyarenko, A ^a   Rykov, S ^a  

^a IOFFE INSTITUTE   (Russian Federation)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Self Interstitial; Silicon; Ultra Shallow Diffusion Profile; Vacancies

Indexed keywords

DIFFUSION; LIGHT TRANSMISSION; SELF ASSEMBLY; SEMICONDUCTOR DOPING; SEMICONDUCTOR QUANTUM WELLS; SEMICONDUCTOR SUPERLATTICES; SPECTROSCOPIC ANALYSIS;

SELF-INTERSTITIALS MICRODEFECTS;

SEMICONDUCTING SILICON;

EID: 18544393524     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/ddf.194-199.673     Document Type: Article

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