Structural studies on ion-implanted semiconductors using X-ray synchrotron radiation: Strain evolution and growth of nanocrystals

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 303-309

  Eichhorn, Frank ^a   Gaca, Jaroslaw ^b   Heera, Viton ^a   Schell, Norbert ^a   Turos, Andrzej ^b   Weishart, Hannes ^a   Wojcik, Marek ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

Compound semiconductors; Diamond; HRXRD; Ion bombardment; RBS

Indexed keywords

AMORPHIZATION; COMPUTER SIMULATION; CRYSTAL GROWTH; DIAMONDS; HETEROJUNCTIONS; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; MONTE CARLO METHODS; SINGLE CRYSTALS; SYNCHROTRON RADIATION; TENSILE STRESS; X RAY DIFFRACTION ANALYSIS; X RAYS;

COMPOUND SEMICONDUCTORS; GRAZING INCIDENCE; ION BEAM SYNTHESIS (IBS); LATTICE DISTORTIONS;

SEMICONDUCTOR MATERIALS;

EID: 18544370566     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.043     Document Type: Conference Paper

References (15)

1. W. Matz, N. Schell, G. Bernhard, F. Prokert, T. Reich, J. Claußner, W. Oehme, R. Schlenk, S. Dienel, H. Funke, F. Eichhorn, M. Betzl, D. Pröhl, U. Strauch, G. Hüttig, H. Krug, W. Neumann, V. Brendler, P. Reichel, M.A. Denecke, and H. Nitsche J Synchrotron Radiat 6 1999 1076
2. A. Dygo, and A. Turos Phys Rev B 40 1989 7704
3. J. Gaca, and M. Wojcik Appl Phys Lett 65 1994 997
4. K. Karsten, and P. Ehrhard Phys Rev B 51 1995 10508
5. M. Törnquist, J. Nissila, F. Kiessling, C. Corbel, and P. Hautojärvi Mater Sci Forum 143/147 1994 34
6. S. Madapura, A.J. Steckl, and M. Loboda J Electrochem Soc 146 1999 1197
7. G. Pensl, and R. Helbig Festkörperprobleme/Adv Solid State Phys 30 1990 133
8. M.V. Rao, D. Nordstrom, and J.A. Gardner Nucl Instrum Methods B 127 1997 655
9. R. Kalish Diamond Relat Mater 10 2001 1749
10. H. Weishart, V. Heera, F. Eichhorn, B. Pecz, A. Barna, and W. Skorupa J Appl Phys 94 2003 1195
11. W. Weishart, V. Heera, F. Eichhorn, B. Pecz, L. Toth, and W. Skorupa Diamond Relat Mater 13 2004 627
12. J.F. Ziegler The stopping and range of ions in solids vol. 2 1985 Pergamon Press New York
13. Dosch H. Critical phenomena at surfaces and interfaces. Springer tracts in modern physics, vol. 126, 1992.
14. B.E. Warren X-ray diffraction 1990 Dover Publications New York
15. International Centre for Diffraction Data. Powder diffraction file.