Surface reconstruction with the photometric method in SEM

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 533-537

  Paluszynski J ^a   Slowko W ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Scanning electron microscopy (SEM); Three dimensional imaging

Indexed keywords

BACKSCATTERING; IMAGING TECHNIQUES; LOW PASS FILTERS; MATHEMATICAL MODELS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SIGNAL PROCESSING;

MAGNETIC MEDIA; PHOTOMETRIC METHODS; SURFACE RECONSTRUCTION; THREE-DIMENSIONAL IMAGING;

SURFACE TOPOGRAPHY;

EID: 18444382044     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.081     Document Type: Conference Paper

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5. W. Slówko Vacuum 52 1999 441