HRTEM analysis of Pt/c multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5168, Issue , 2004, Pages 508-517

  Ohnishi, Naoyuki ^a   Nonomura, Yuji ^a   Ogasaka, Yasushi ^b   Tawara, Yuzuru ^b   Namba, Yoshiharu ^a   Yamashita, Koujun ^b  

^a CHUBU UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Dc magnetron sputtering; High resolution transmission electron microscopy; Interface structure; Ion beam sputtering; Nano scale fabrication; Pt C multilayer mirror; Thin film; X ray optics

Indexed keywords

CARBON; ELECTRON DIFFRACTION; FABRICATION; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAMS; MAGNETRON SPUTTERING; PLATINUM; SILICON WAFERS; SUBSTRATES; THIN FILMS; X RAY OPTICS;

DC-MAGNETRON SPUTTERING; INTERFACE STRUCTURES; ION BEAM SPUTTERING; NANOSCALE FABRICATION; PT/C MULTILAYER MIRRORS;

MULTILAYERS;

EID: 1842789993     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.508632     Document Type: Conference Paper

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