Pulsed laser deposition of advanced titanium nitride thin layers

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 580-584

  Major, B ^a   Mroz W ^b   Wierzchon T ^c   Waldhauser, W ^d   Lackner, J ^d   Ebner, R ^d  

^a INSTITUTE OF METALLURGY AND MATERIALS SCIENCE   (Poland)

^b MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

^c WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^d JOANNEUM RESEARCH   (Austria)

Author keywords

Morphology; Polyurethane; Residual stresses; Titanium nitride

Indexed keywords

ABLATION; ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRESS; DIFFRACTION; NEODYMIUM ALLOYS; PULSED LASER DEPOSITION; RESIDUAL STRESSES; THICK FILMS;

DIFFRACTION LINE BROADENING; LATTICE STRAIN;

TITANIUM NITRIDE;

COATING;

EID: 1842782581     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.154     Document Type: Article

References (10)

1. Rickerby D.S. Matthews A. Advanced Surface Coatings: A Handbook of Surface Engineering 1991 Chapman and Hall New York
2. Rubahn H.-G. Laser Applications in Surface Science and Technology 1999 John Wiley Chichester
3. Chrisey D.B. Hubler G.K. Pulsed Laser Deposition of Thin Films 1994 John Wiley and Sons
4. Miller J.C. Haglund Jr. R.F. Laser Ablation and Desorption 30 1998 Academic Press San Diego
5. Krebs H.-U. Int. J. Non-Equilibrium Processing 10 1997 3
6. Bull S.J. Rickerby D.S. Amitabhjain The sliding wear of titanium nitride coatings Surf. Coat. Technol. 41 1990 269
7. Coll B.F. Jacquot P. Surface modification of medical implants and surgical devices using TiN layers Surf. Coat. Technol. 36 1988 867
8. R.Ebner, W.Waldhauser, W.Lenz, Pulsed laser deposition: a new technique for coating sheet materials and three-dimensional industrial components, Proc. Materials Week 2001, Munich, 2001
9. B.Major, R.Ebner, Laser applications in surface modification and pulsed laser deposition, J. Tech. Phys., Special Supplement Vol.XL. No 3, Warszawa (1999)161
10. Major B. Ebner R. Titanium-based films deposited using a Nd:YAG pulsed laser Appl. Phys. A69 1-3 1999 921