Kinetics of etching of poly(ethylene terephthalate) and polyimide in an oxygen plasma

High Energy Chemistry

Volumn 32, Issue 6, 1998, Pages 422-426

  Rybkin, V V ^a  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842762585     PISSN: 00181439     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. Gil'man, A.B. and Potapov, V.K., Prikl. Fiz., 1995, no. 3/4, p. 14.
2. Rybkin, V.V., Maximov, A.I., Gorberg, B.I., and Titov, V.A., Proc. 8th Int. Symp. Techtextil-Symp. 97, Block 5: Plasma Finishing, Frankfurt am Main, 1997, p. 10.
3. Karulina, E.I. and Lebedev, Yu.A., Plazmokhimiya-91 (Plasma Chemistry'91), Polak, L.S., Ed., Moscow: Inst. Neftekhimicheskogo Sinteza Akad. Nauk SSSR, 1991, p. 7.
4. Ferreira, C.M. and Gousset, G., J. Appl. Phys., 1991, vol. 24, no. 5, p. 775.