Design and simulation of essential parts of active microsystems

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 219-222

  Edler, J ^a   Germer, C ^b   Hansen, U ^b   Kopp, D ^a   Li, J ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; CONDUCTIVE MATERIALS; CONTROL SYSTEM SYNTHESIS; ELECTRIC INSULATING MATERIALS; MAGNETIC FLUX; PHOTOLITHOGRAPHY; POSITION CONTROL; SERVOMECHANISMS; SOFT MAGNETIC MATERIALS; SUBSTRATES;

ELECTROCONDUCTIVE MATERIAL; ROTATIONAL MOVEMENT; SERVO DRIVE; TRANSLATORY MOVEMENT; VARIABLE RELUCTANCE DRIVE;

MICROACTUATORS;

EID: 1842611461     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-356-1     Document Type: Article

References (4)

1. Edler J; Stölting H-D; Föhse M; Gatzen HH (2002) A linear microactuator with enhanced design. Microsys Technol 7: S. 261-264
2. Föhse M; Kohlmeier T; Gatzen HH (2001) Thinfilm technologies to fabricate a linear microactuator. Sensors and Actuators A: Physical 91 (1-2) 145-149
3. Kopp D; Ahlers H (2000) Measurement of the static stiffness of an operating model of an aerostatic linear guidance for microsystems. Proc of the 11th Int DAAAM Symposium, Opatija, Croatia
4. Tönshoff HK; Kopp D (2001) Scaling aerostatic technology to microsystems. Annals of the German academic society for production engineering (WGP). Production Eng VIII/I: S. 145-148