A surface topographic measurement system using a microfork

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 65, Issue 12, 1999, Pages 1751-1755

  Takahashi, Ken ^a   Hatsuzawa, Takeshi ^a  

^a NONE

Author keywords

Microfork; Surface measurement system; Tapping stylus

Indexed keywords

EID: 1842600840     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.65.1751     Document Type: Article

References (6)

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2. X. Shan and S. Kiyono : Development of a Millimeter-Scale Scanning Tunneling Microscope, JSME Int. J., C36,3 (1993) 340
3. Ken Takahashi, Masanori Hayase and Takeshi Hatsuzawa : Optimum Shape Fabrication of Tungsten Probe using DC Electropolishing, Transducers '99 Digest of Technical Papers, 1(1999)552