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Volumn 5162, Issue , 2003, Pages 129-138
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Testing highly aberrated large optics with a Shack-Hartmann wavefront sensor
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Author keywords
Hartmann Shack; Large optics; Optical metrology; Optical testing; Shack Hartmann; Wavefront sensor; XCALIBIR interferometer
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Indexed keywords
ABERRATIONS;
CHARGE COUPLED DEVICES;
INTERFEROMETERS;
OPTICAL COLLIMATORS;
OPTICAL TESTING;
SILICON WAFERS;
WAVEFRONTS;
LARGE OPTICS;
OPTICAL METROLOGY;
SHACK-HARTMANN;
WAVEFRONT SENSORS;
XCALIBIR INTERFEROMETERS;
OPTICAL SENSORS;
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EID: 1842583972
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.510795 Document Type: Conference Paper |
Times cited : (15)
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References (8)
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