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Volumn 5162, Issue , 2003, Pages 129-138

Testing highly aberrated large optics with a Shack-Hartmann wavefront sensor

Author keywords

Hartmann Shack; Large optics; Optical metrology; Optical testing; Shack Hartmann; Wavefront sensor; XCALIBIR interferometer

Indexed keywords

ABERRATIONS; CHARGE COUPLED DEVICES; INTERFEROMETERS; OPTICAL COLLIMATORS; OPTICAL TESTING; SILICON WAFERS; WAVEFRONTS;

EID: 1842583972     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.510795     Document Type: Conference Paper
Times cited : (15)

References (8)
  • 1
  • 2
    • 0042808435 scopus 로고    scopus 로고
    • Ritchey-Common test analyzes uncoated optics
    • July
    • M. Zecchino, "Ritchey-Common test analyzes uncoated optics," Photonics Spectra, p. 34 (July 2003).
    • (2003) Photonics Spectra , pp. 34
    • Zecchino, M.1
  • 3
    • 0003333241 scopus 로고    scopus 로고
    • Wavefront sensors for control and process monitoring in optics manufacture
    • D. R. Neal, D. J. Armstrong and W. T. Turner, "Wavefront sensors for control and process monitoring in optics manufacture," SPIE 2993, pp. 211-220, 1997.
    • (1997) SPIE , vol.2993 , pp. 211-220
    • Neal, D.R.1    Armstrong, D.J.2    Turner, W.T.3
  • 4
    • 0036986438 scopus 로고    scopus 로고
    • Shack-Hartmann wavefront sensor precision and accuracy
    • D. R. Neal, J. Copland, D.A. Neal, "Shack-Hartmann wavefront sensor precision and accuracy," SPIE 4779, 2002.
    • (2002) SPIE , vol.4779
    • Neal, D.R.1    Copland, J.2    Neal, D.A.3
  • 5
    • 0036983807 scopus 로고    scopus 로고
    • High-speed, non-interferometric nanotopographic characterization of Si wafer surfaces
    • T.D. Raymond, D.R. Neal, D.M. Topa, and T.L. Schmitz, "High-speed, non-interferometric nanotopographic characterization of Si wafer surfaces," SPIE 4809-34, 2002.
    • (2002) SPIE , vol.4809 , Issue.34
    • Raymond, T.D.1    Neal, D.R.2    Topa, D.M.3    Schmitz, T.L.4
  • 6
    • 1842420891 scopus 로고    scopus 로고
    • Data synthesis using slope and OPD stitching
    • D. M. Topa, "Data synthesis using slope and OPD stitching," SPIE 5162-18, 2003.
    • (2003) SPIE , vol.5162 , Issue.18
    • Topa, D.M.1
  • 7
    • 0034864479 scopus 로고    scopus 로고
    • The effect of lenslet resolution on the accuracy of ocular wavefront measurements
    • See for example: D. R. Neal, D. M. Topa, and James Copland, "The effect of lenslet resolution on the accuracy of ocular wavefront measurements," SPIE 4245, 2001.
    • (2001) SPIE , vol.4245
    • Neal, D.R.1    Topa, D.M.2    Copland, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.