Process development in machining of micro guideways

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 257-260

  Denkena, B ^a   Hoffmeister, H W ^b   Reichstein, M ^a   Illenseer, S ^b  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; FINISHING; GRINDING (MACHINING); GRINDING WHEELS; KINEMATICS; PROCESS ENGINEERING; SURFACE ROUGHNESS;

FACE GRINDING; MICRO DRILLING; PERIPHERAL GRINDING; PROCESS DEVELOPMENT;

MICROMACHINING;

EID: 1842559378     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0359-y     Document Type: Article

References (2)

1. Tönshoff HK; Kopp D (2001) Scaling aerostatic technology to microsystems. In: WGP-annals, production engineering - research and development, Vol. 8, pp. 145-148
2. Tönshoff HK; Friemuth T; Reichstein M (2001) Ultra precision grinding of porous and non-porous super hard and brittle materials for components of micro systems. In: WGP annals; production engineering - research and development, Vol. 8, pp. 21-24