Application of fuzzy adaptive networks in manufacturing: Waviness removal in grinding of wire-sawn silicon wafers

American Society of Mechanical Engineers, Manufacturing Engineering Division, MED

Volumn 14, Issue , 2003, Pages 643-652

  Jiao, Yue ^a   Lei, Shuting ^a   Wu, Jian ^a   Pei, Z J ^a   Lee, E Stanley ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

Finite Element Analysis; Fuzzy Adaptive Network; Silicon Wafers; Soft Pad Grinding

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FUZZY SETS; GRINDING (MACHINING); MATHEMATICAL MODELS; MICROPROCESSOR CHIPS; NEURAL NETWORKS; SILICON WAFERS;

FUZZY ADAPTIVE NETWORK; SOFT PAD GRINDING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1842485972     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2003-41821     Document Type: Conference Paper

References (20)

1. Merchant, M.E., 1998, "Interpretive look at 20th century research on modeling of machining," Machining Science and Technology, 2(2), 157-163.
2. Ehmann, K.F., Kapoor, S.G., DeVor, R.E., and Lazoglu, I., 1997, "Machining process modeling: a review," Journal of Manufacturing Science and Engineering, 119(4B), 655-663.
3. Lee, Y.H., Yang, B.H., and Moon, K.S., 1999, "An economic machining process model using fuzzy non-linear programming and neural network," International Journal of Production Research, 37(4), 835-847.
4. Cheng, C.-B., and Lee, E.S., 1999, "Applying Fuzzy Adaptive Network to Fuzzy Regression Analysis," Computers and Mathematics with Applications, 38, 123-140.
5. Jiao, Y., 2002, "Fuzzy adaptive networks and applications to humanistic systems," Ph.D. Thesis, Kansas State University.
6. Tricard, M., Kassir, S., Herron, P., and Pei, Z.J., 1998, "New abrasive trends in manufacturing of silicon wafers," Silicon Machining Symposium, American Society for Precision Engineering, April, St. Louis, Missouri.
7. Bawa, M.S., Petro, E.F., and Grimes, H.M., 1995, "Fracture strength of large diameter silicon wafers," Semiconductor International, November,. 115-118.
8. Fukami, T., Masumura, H., Suzuki, K., and Kudo, H., 1997, "Method of manufacturing semiconductor mirror wafers," European Patent Application, EP0782179A2, Bulletin 1997/27.
9. Pei, Z.J., and Strasbaugh, A., 2001, "Fine grinding of silicon wafers," International Journal of Machine Tools and Manufacture, 41(5), 659-672.
10. Tonshoff, H.K., Schmieden, W.V., Inasaki, I., Konig, W., and Spur, G., 1990, "Abrasive machining of silicon," Annals of CIRP, 39(2), 621-630.
11. Vandamme, R., Y. Xin, Y., and Z.J. Pei, 2000, "Method of processing semiconductor wafers," U.S. Patent 6,114,245, September 5, 2000.
12. Werner, P.G., and Renter, I.M., 1988, "Comparative study of advanced slicing techniques for silicon," Intersociety symposium on machining of advanced ceramic materials and components, edited by S.Chandrasekar, R. Komanduri, W. Daniels and W. Rapp, The American Society of Mechanical Engineers, New York, NY.
13. Buttner, A., 1985, "I.D. sawing - diameters increase," Industrial Diamond Review, 2, 77-79.
14. Yasunaga, N., Takashina, M., and Itoh, T., 1997, "Development of sequential grinding-polishing process applicable to large-size Si wafer finishing," Advances in Abrasive Technology, Proceedings of the International Symposium, Sydney, Australia, July 8-10, 1997,. 96-100.
15. Kato, T., Masumura, H., Okuni, S., and Kudo, H., 1997, "Method of manufacturing semiconductor wafers," European patent application, EP0798405A2.
16. Kassir, S.M., and Walsh, T.A., 1999, "Grinding process and apparatus for planarizing sawed wafers," U.S. Patent 5,964,646, Oct. 12, 1999.
17. Jang, J.-S. R., Sun, C.-T., and Mizutani, E., 1997, Neuro-fuzzy and Soft Computing: A Computational Approach to Learning and Machine Intelligence, Prentice Hall, Upper Saddle River.
18. Takagi, T. and Sugeno, F., 1985, "Fuzzy identification of systems and its application to modeling and control," IEEE Transactions on Systems, Man, and Cybernetics, 15(1), 116-132.
19. Wang, L.-X., 1994, Adaptive Fuzzy Systems and Control: Design and Stability Analysis, Prentice Hall.
20. Chang, P.-T., and Lee, E.S., 1994, "Ranking of fuzzy sets based on the concept of existence," Computers and Mathematics with Applications, 27(9/10), 1-20.