Performance evaluation of a MEMS-based deformable mirror for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5162, Issue , 2003, Pages 70-78

  Wallace, Brian ^a   Bradley, Colin ^a   Hampton, Peter ^a  

^a UNIVERSITY OF VICTORIA   (Canada)

Author keywords

Adaptive optics; Deformable mirror; MEMS

Indexed keywords

ACTUATORS; ADAPTIVE SYSTEMS; ASTRONOMY; DEGREES OF FREEDOM (MECHANICS); ERROR ANALYSIS; MICROELECTROMECHANICAL DEVICES; MIRRORS; TELESCOPES;

DEFORMABLE MIRRORS; MEMS; MICROELECTROMECHANICAL SYSTEM (MEMS);

ADAPTIVE OPTICS;

EID: 1842426941     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506587     Document Type: Conference Paper

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