Coating deposition and surface modification under combined plasma processing

Vacuum

Volumn 73, Issue 3-4, 2004, Pages 555-560

  Tereshin, Vladimir ^a   Bandura, Andrey ^a   Byrka, Oleg ^a   Chebotarev, Vladimir ^a   Garkusha, Igor ^a   Shvets, Oleg ^a   Taran, Valeri ^a  

^a INSTITUTE OF PLASMA PHYSICS   (Ukraine)

Author keywords

Coatings; HF discharge; Plasma accelerator; Surface modification; Tribological properties

Indexed keywords

COATINGS; CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; PLASMA ACCELERATORS; PLASMA APPLICATIONS; SOLIDIFICATION; TRIBOLOGY;

DIELECTRIC COATINGS; TRIBOLOGICAL PROPERTIES;

SURFACE TREATMENT;

EID: 1842425388     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.086     Document Type: Conference Paper

References (7)

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7. Tereshin V.I., Bandura A.N., Bovda A.M., et al. Rev Sci Instrum. 73(2):2002;831-833.