Using Location of Diffraction Orders to Predict Performance of Future Scanners

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5256, Issue 2, 2003, Pages 973-984

  Brooker, Peter ^a  

^a Sigma C   (United States)

Author keywords

Aerial image; AltPSM; Fraunhofer diffraction; Lithography; Modeling

Indexed keywords

DIFFRACTION; DYNAMIC RANDOM ACCESS STORAGE; IMAGE ANALYSIS; INTEGRATED CIRCUITS; LIGHTING; SILICON WAFERS;

DIFFRACTION ORDERS;

PHOTOLITHOGRAPHY;

EID: 1842422465     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.518040     Document Type: Conference Paper

References (5)

1. P. Brooker, Roles of NA, Sigma and Lambda in low-k1 Aerial Image Formation, Proceedings of SPIE Vol. 4346 (2001), p. 1575-1586
2. See http://www.sematech.org/public/resources/litho/ngl/ngl0901/output. htm. Check under the supplier presentations.
3. See www.sigma-c.com
4. J. Goodman, Introduction to Fourier Optics, p. 61, McGraw-Hill, 1968
5. R. Courant, D. Hilbert, Methods of Mathematical Physics, p.76, John Wiley & Sons, 1989