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Volumn 123-124, Issue , 1998, Pages 120-125

A comparison of S-passivation of III-V (001) surfaces using (NH 4 ) 2 S x and S 2 Cl 2

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; AMORPHOUS MATERIALS; ANNEALING; BINDING ENERGY; ELECTRON ENERGY LEVELS; ETCHING; PASSIVATION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES; SULFUR COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 18344400045     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00424-8     Document Type: Article
Times cited : (30)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.