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Volumn 123-124, Issue , 1998, Pages 120-125
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A comparison of S-passivation of III-V (001) surfaces using (NH 4 ) 2 S x and S 2 Cl 2
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIUM COMPOUNDS;
AMORPHOUS MATERIALS;
ANNEALING;
BINDING ENERGY;
ELECTRON ENERGY LEVELS;
ETCHING;
PASSIVATION;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
SUBSTRATES;
SULFUR COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
AMMONIUM SULFIDE;
CORE LEVEL EMISSION SPECTROSCOPY;
SULFUR CHLORIDE;
SURFACE TREATMENT;
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EID: 18344400045
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00424-8 Document Type: Article |
Times cited : (30)
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References (19)
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