Numerical analysis of spatial field in hot filament chemical vapor deposition diamond film

Jinshu Xuebao/Acta Metallurgica Sinica

Volumn 41, Issue 4, 2005, Pages 437-443

  Li, Jianguo ^a,b   Liu, Shi ^a   Li, Yiyi ^a   Hu, Dongping ^b   Ji, Xilin ^b   Mei, Jun ^b   Zhou, Dehui ^b  

^a INSTITUTE OF METAL RESEARCH   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Coupled model; HFCVD; Simulation; Spatial field

Indexed keywords

EID: 18344370645     PISSN: 04121961     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)