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Applied Surface Science

Volumn 104-105, Issue , 1996, Pages 204-212

Structural properties of epitaxial suicide layers on Si

(5) Von Kanel H a Muller E a Goncalves Conto, S a Schwarz, C a Onda, N a

a ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; CRYSTAL STRUCTURE; IRON COMPOUNDS; SILICATES; SURFACE STRUCTURE; THERMAL EFFECTS;

SILICIDES;

SEMICONDUCTING SILICON;

EID: 18244420875 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00145-6 Document Type: Article

Times cited : (9)

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