Hydrogen standards in elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 115-124

  Wang, Y Q ^a,b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

ERD; H implant; Hydrogen standard; Ion implanted polymer films; Kapton

Indexed keywords

BACKSCATTERING; CALIBRATION; CURING; DRYING; ERBIUM; ISOTOPES; SILICON WAFERS; THIN FILMS;

ELASTIC RECOIL DETECTION (ERD); H-IMPLANT; ION IMPLANTED POLYMER FILMS; KAPTON;

HYDROGEN;

EID: 18144441114     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.038     Document Type: Conference Paper

References (22)

1. L'Ecuyer J., Brassard C., Cardinal C., Chabbal J., Deschenes L., Labrie J.P., Terreault B., Martel J.G., St.-Jacques R. J. Appl. Phys. 47:1976;881.
2. Doyle B.L., Peercy P.S. Appl. Phys. Lett. 34:1979;811.
3. Mills P.J., Green P.F., Palmstrom C.J., Mayer J.W., Kramer E.J. Appl. Phys. Lett. 45:1984;958.
4. Turos A., Meyer O. Nucl. Instr. and Meth. B. 4:1984;92.
5. Genzer J., Rothman J.B., Composto R.J. Nucl. Instr. and Meth. B. 86:1994;345.
6. Benenson R.E., Wielunski L.S., Lanford W.A. Nucl. Instr. and Meth. B. 15:1986;453.
7. Doyle B.L., Brice D.K. Nucl. Instr. and Meth. B. 35:1988;301.
8. Wang Y.Q., Liao C.G., Yang S.S., Zheng Z.H. Nucl. Instr. and Meth. B. 47:1990;427.
9. J.C. Barbour, B.L. Doyle, In: J. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, MRS Publisher, 1995, Chapter 5, p. 83.
10. Tirira J., Serruys Y., Trocellier P. Forward Recoil Spectrometry. 1996;Plenum Press, New York.
11. Composto R.J., Walters R.M., Genzer J. Mater. Sci. Eng. R: Rep. R. 38:2002;107.
12. G. Boudreault, R.G. Elliman, R. Grötzschel, S.C. Gujrathi, C. Jeynes, W.N. Lennard, E. Rauhala, T. Sajavaara, H. Timmers, Y.Q. Wang, T.D.M. Weijers, Round robin: measurement of H implants in Si by ERDA, Nucl. Instr. and Meth. B, to be published. doi:10.1016/j.nimb.2004.02.022.
13. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Matter. 1985;Pergamon Press, New York. Stopping power compilation SRIM2000, http://www.srim.org/.
14. Wielunski L.S. Nucl. Instr. and Meth. B. 118:1996;256.
15. Szilagyi E. Nucl. Instr. and Meth. B. 161-163:2000;37.
16. Baglin J.E.E., Kellock A.J., Crockett M.A., Shih A.H. Nucl. Instr. and Meth. B. 64:1992;469.
17. Konac G., Kalbitzer S., Klatt C., Niemann D., Stoll R. Nucl. Instr. and Meth. B. 136-138:1998;159.
18. ERD simulation package provided by courtesy of Dr. Williams Lennard at The University of Western Ontario.
19. J.C. Banks, J.F. Browning, W.R. Wampler, B.L. Doyle, C.A. LaDuca, J.R. Tesmer, C.J. Wetteland, Y.Q. Wang, Round robin analysis of hydrogen isotope thin film standards, Nucl. Instr. and Meth. B, these Proceedings. doi:10.1016/j.nimb.2004.01.099.
20. Kim C.S., Kim S.K., Choi H.D. Nucl. Instr. and Meth. B. 155:1999;229.
21. Y.Q. Wang, L.B. Bridwell, R.E. Giedd, in: R. Arshady (Ed.), Desk Reference of Functional Polymers: Synthesis and Applications, ACS Publisher, 1997, Chapters 2.5 and 2.6, p. 371.
22. Wang Y.Q. Nucl. Instr. and Meth. B. 161-163:2000;1027.