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Applied Physics A: Materials Science and Processing

Volumn 81, Issue 1, 2005, Pages 209-215

DC magnetron sputtered tungsten: W film properties and electrical properties of W/Si Schottky diodes

(3) Bouziane, K a Mamor, M b Meyer, F c

a SULTAN QABOOS UNIVERSITY (Oman)

b UNIVERSITY OF LEUVEN (Belgium)

c CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRIC CURRENTS; ELECTRIC PROPERTIES; FERMI LEVEL; GRAIN SIZE AND SHAPE; KINETIC ENERGY; LATTICE CONSTANTS; MAGNETRON SPUTTERING; METALLIC FILMS; PHASE TRANSITIONS; SCHOTTKY BARRIER DIODES; SILICON; SPUTTER DEPOSITION; THIN FILMS;

GAS PRESSURE; MAGNETRON SPUTTERED TUNGSTEN; STRESS TRANSITIONS; THIN FILM DEPOSITION;

TUNGSTEN;

EID: 18144431038 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2558-5 Document Type: Article

Times cited : (22)

References (25)

1
- 0024639940
- S.M. Rossnagel, S.S. Cuno: Thin Solid Films 171, 143 (1989)
- (1989) Thin Solid Films , vol.171 , pp. 143
- Rossnagel, S.M.¹ Cuno, S.S.²

2
- 0024641687
- J.A. Thornton, D.W. Hoffman: Thin Solid Films 171, 5 (1989)
- (1989) Thin Solid Films , vol.171 , pp. 5
- Thornton, J.A.¹ Hoffman, D.W.²

3
- 0024640955
- F.M.d'Heurle, J.M.E. Harper: Thin Solid Films 171, 81 (1989)
- (1989) Thin Solid Films , vol.171 , pp. 81
- D'Heurle, F.M.¹ Harper, J.M.E.²

4
- 21544431995
- H. Windirschman: J. Appl. Phys. 62, 1800 (1987)
- (1987) J. Appl. Phys. , vol.62 , pp. 1800
- Windirschman, H.¹

5
- 84953846989
- J. Vac. Sci. Technol., A 7, 2247 (1989)
- (1989) J. Vac. Sci. Technol., A , vol.7 , pp. 2247

6
- 18144368014
- M. Eizenberg, F. Meyer, A. Benhocine, D. Bouchier: J. Appl. Phys. 75, 3900 (1994)
- (1994) J. Appl. Phys. , vol.75 , pp. 3900
- Eizenberg, M.¹ Meyer, F.² Benhocine, A.³ Bouchier, D.⁴

7
- 0016872072
- F. Mullins, A. Brunnschweiler: Solid State Electron. 19, 47 (1976)
- (1976) Solid State Electron. , vol.19 , pp. 47
- Mullins, F.¹ Brunnschweiler, A.²

8
- 0019036849
- E. Grussell, S. Berg, L.P. Andersson: J. Electrochem. Soc. 127, 1573 (1980)
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1573
- Grussell, E.¹ Berg, S.² Andersson, L.P.³

9
- 21544438944
- S.J. Fonash, S. Ashok, R. Singh: Appl. Phys. Lett. 39, 423 (1981)
- (1981) Appl. Phys. Lett. , vol.39 , pp. 423
- Fonash, S.J.¹ Ashok, S.² Singh, R.³

10
- 0020140816
- F.D. Auret, O. Paz, N.A. Bojarcczuk: Thin Solid Films 104, 339 (1983)
- (1983) Thin Solid Films , vol.104 , pp. 339
- Auret, F.D.¹ Paz, O.² Bojarcczuk, N.A.³

11
- 0025855453
- M.O. Aboelfotoh: Solid State Electronics. 34, 51 (1991)
- (1991) Solid State Electronics. , vol.34 , pp. 51
- Aboelfotoh, M.O.¹

12
- 0343370911
- J.H. Werner: Appl. Phys. Lett. 54, 1528 (1989)
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1528
- Werner, J.H.¹

13
- 21344485687
- A. Abduraimov, S.Z. Zainabidinov, O.O. Mamatkarimov, O. Khimmatkulov: Semiconductors 27, 671 (1993)
- (1993) Semiconductors , vol.27 , pp. 671
- Abduraimov, A.¹ Zainabidinov, S.Z.² Mamatkarimov, O.O.³ Khimmatkulov, O.⁴

14
- 0001013796
- W. Shan, M.F. Li, P.Y. Yu, W.L. Hansen, W. Walukiewicz: Appl. Phys. Lett. 53,974 (1988)
- (1988) Appl. Phys. Lett. , vol.53 , pp. 974
- Shan, W.¹ Li, M.F.² Yu, P.Y.³ Hansen, W.L.⁴ Walukiewicz, W.⁵

15
- 0029239176
- M. Mamor. E. Finkman, F. Meyer, K. Bouziane: Mater. Res. Soc. Sympo. Proc. 356, 149 (1995)
- (1995) Mater. Res. Soc. Sympo. Proc. , vol.356 , pp. 149
- Mamor, M.¹ Finkman, E.² Meyer, F.³ Bouziane, K.⁴

16
- 0041159016
- M. Mamor, E. Dufour-Gergam, E. Finkman, G. Tremblay, F. Meyer, K. Bouziane: Appl. Surf. Sci. 91, 342 (1995)
- (1995) Appl. Surf. Sci. , vol.91 , pp. 342
- Mamor, M.¹ Dufour-Gergam, E.² Finkman, E.³ Tremblay, G.⁴ Meyer, F.⁵ Bouziane, K.⁶

17
- 0003546026
- Oxford Sci. Pub., Oxford
- H. Rhoderick, R.H. Williams: Metal Semiconductor Contacts, 2nd ed., (Oxford Sci. Pub., Oxford 1988)
- (1988) Metal Semiconductor Contacts, 2nd Ed.
- Rhoderick, H.¹ Williams, R.H.²

18
- 0024106331
- J.H. Werner: Appl. Phys. A 47, 291 (1988)
- (1988) Appl. Phys. A , vol.47 , pp. 291
- Werner, J.H.¹

19
- 0018334139
- W. Hoffman, J.A. Thornton: J. Vac. Sci. Technol. 17, 380 (1980)
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 380
- Hoffman, W.¹ Thornton, J.A.²

20
- 36449000058
- J.H. Werner, H.H. Güttler: J. Appl. Phys. 69, 1522 (1991)
- (1991) J. Appl. Phys. , vol.69 , pp. 1522
- Werner, J.H.¹ Güttler, H.H.²

21
- 84940510002
- J.H. Werner, H.H. Güttler: Physica Scr. T. 39, 258 (1991)
- (1991) Physica Scr. T. , vol.39 , pp. 258
- Werner, J.H.¹ Güttler, H.H.²

22
- 18144395361
- Ph.D. Thesis (Uni. of Orsay, Paris XI France)
- M. Mamor: Ph.D. Thesis (Uni. of Orsay, Paris XI France 1996)
- (1996)
- Mamor, M.¹

23
- 0023349923
- D.A. Vanderbroucke, R.L.v. Mierhaegte, W.H. Lafrere, F. Cardon: Semicond. Sci. Technol. 2, 293 (1987)
- (1987) Semicond. Sci. Technol. , vol.2 , pp. 293
- Vanderbroucke, D.A.¹ Mierhaegte, R.L.V.² Lafrere, W.H.³ Cardon, F.⁴

24
- 0342407523
- F.D. Auret, S.A. Goodman, Y. Leclerc, G. Myburg, C. Schutte: Meas. Sci. Technol. 13, 945 (1997)
- (1997) Meas. Sci. Technol. , vol.13 , pp. 945
- Auret, F.D.¹ Goodman, S.A.² Leclerc, Y.³ Myburg, G.⁴ Schutte, C.⁵

25
- 0009499467
- V. Aubry, F. Meyer, P. Warren, D. Dutartre: Appl. Phys. Lett. 63, 2520 (1993)
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2520
- Aubry, V.¹ Meyer, F.² Warren, P.³ Dutartre, D.⁴

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