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Volumn 27, Issue 6, 2004, Pages 87-94

The next wafer diameter change

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SIZE; EQUIPMENT DESIGN; MARKET PENETRATION; WAFER DIAMETER;

EID: 18144395412     PISSN: 01633767     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review
Times cited : (2)

References (11)
  • 1
    • 84860925582 scopus 로고    scopus 로고
    • International Technology Roadmap for Semiconductors (ITRS), 2001 edition
    • International Technology Roadmap for Semiconductors (ITRS), 2001 Edition, Front End Processes and Lithography, http://public.itrs. net/Files/2001 ITRS/Home.htm
    • Front End Processes and Lithography
  • 2
    • 4344653108 scopus 로고    scopus 로고
    • ITRS 2003 Edition, http://public.itrs.net/Files/20031TRS/Home.htm.
    • ITRS 2003 Edition
  • 3
    • 3142528385 scopus 로고    scopus 로고
    • 2003 ITRS highlights
    • (and other related papers in this volume), January
    • P.A. Gargini and R.R. Doering, "2003 ITRS Highlights" (and other related papers in this volume), Solid State Technology, January 2004, p. 72.
    • (2004) Solid State Technology , pp. 72
    • Gargini, P.A.1    Doering, R.R.2
  • 4
    • 3142648967 scopus 로고    scopus 로고
    • ITRS roadmap must become more realistic, says applied CEO
    • Oct. 2
    • M. LaPedus, "ITRS Roadmap Must Become More Realistic, Says Applied CEO," Silicon Strategies, Oct. 2, 2003, www.siliconstrategies.com/article/ showArticle.jhtml?articleID=15201136.
    • (2003) Silicon Strategies
    • LaPedus, M.1
  • 6
    • 0036807168 scopus 로고    scopus 로고
    • Evolving business strategies are key to upbeat 300mm outlook
    • October
    • D. Vogler, "Evolving Business Strategies Are Key to Upbeat 300mm Outlook," Solid State Technology, October 2002, p. 27.
    • (2002) Solid State Technology , pp. 27
    • Vogler, D.1
  • 7
    • 18144390936 scopus 로고    scopus 로고
    • Future silicon trends
    • Rose Associates, Sept. 13-15
    • D.J. Rose, "Future Silicon Trends," Emcon, Rose Associates, Sept. 13-15, 1999.
    • (1999) Emcon
    • Rose, D.J.1
  • 8
    • 0020833030 scopus 로고
    • Silicon epitaxy, a 1983 Perspective
    • October
    • M. Hammond, "Silicon Epitaxy, a 1983 Perspective," Semiconductor international, October 1983, p. 58.
    • (1983) Semiconductor International , pp. 58
    • Hammond, M.1
  • 10
    • 3142521941 scopus 로고    scopus 로고
    • 300 mm perceptions and realities
    • October
    • S.W. Jones, "300 mm Perceptions and Realities," Semiconductor International, October 2003, p. 69.
    • (2003) Semiconductor International , pp. 69
    • Jones, S.W.1
  • 11


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.