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Volumn 94, Issue 3, 2005, Pages

Enhanced infrared transmission through subwavelength coaxial metallic arrays

Author keywords

[No Author keywords available]

Indexed keywords

COAXIAL ARRAY STRUCTURES; COAXIAL GAPS; COAXIAL METALLIC ARRAYS; GUIDED ELECTROMAGNETIC MODES;

EID: 18044373024     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.94.033902     Document Type: Article
Times cited : (214)

References (18)
  • 11
    • 18044375108 scopus 로고    scopus 로고
    • note
    • Process flow: deposit Wanket SiN layer; define photoresist (PR) hole array by interferometric lithography; anistropically etch SiN in holes; isotropically etch SiN to generate an undercut defining the gap; deposit and lift off 1st Au layer to form central dots; spin a thick layer of PR and etch back to expose SiN; etch off SiN, leaving PR filler; deposit and lift off 2nd Au film to form outer mesh.
  • 14


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.