Micro-electromechanical systems spatial light modulator development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4124, Issue 1, 2000, Pages 26-31

  Olivier, S ^a   Bierden, P ^b   Bifano, T ^c   Bishop, D ^d   Carr, E ^a,e   Cowan, W ^f   Hart, M ^g   Helmbrecht, M ^g   Krulevitch, P ^a   Muller, R ^g   Sadoulet, B ^g   Solgaard, O ^h   Yu, J ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b BOSTON MICROMACHINES CORPORATION   (United States)

^c BOSTON UNIVERSITY   (United States)

^d NOKIA RESEARCH CENTER   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f AIR FORCE RESEARCH LABORATORY   (United States)

^g UNIVERSITY OF CALIFORNIA   (United States)

^h Stanford University   (United States)

Author keywords

Adaptive optics; MEMS; Micro electromechanical systems; Microfabrication; Spatial light modulator

Indexed keywords

ACTUATORS; COATING TECHNIQUES; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; WAVEFRONTS;

PISTON MIRROR ARRAY DEVICES;

ADAPTIVE OPTICS;

EID: 17944377861     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.407513     Document Type: Article

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