Morphology control of ultrafine CeO2 and its polishing efficacy

Chinese Journal of Mechanical Engineering (English Edition)

Volumn 18, Issue 1, 2005, Pages 14-16

  Chen, Jianqing ^a   Chen, Zhigang ^b   Li, Jinchun ^b  

^a JIANGSU UNIVERSITY   (China)

^b CHANGZHOU UNIVERSITY   (China)

Author keywords

Ageing time; Cerium dioxide (CeO2) precursor; Chemical mechanical polishing (CMP); Homogenous precipitation

Indexed keywords

CALCINATION; MORPHOLOGY; PARTICLE SIZE ANALYSIS; PRECIPITATION (CHEMICAL); SURFACE ROUGHNESS; UREA;

AGEING TIME; CERIUM DIOXIDE PRECURSOR; CERIUM NITRATE; HOMOGENOUS PRECIPITATION; MORPHOLOGY CONTROL; ULTRAFINE CERIA;

CHEMICAL MECHANICAL POLISHING;

EID: 17944373290     PISSN: 10009345     EISSN: None     Source Type: Journal    
DOI: 10.3901/cjme.2005.01.014     Document Type: Article

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