Engineering tool set for monolithic and hybrid microsystem design

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3225, Issue , 1997, Pages 76-84

  Boutamine, H ^a   Karam, J M ^a   Courtois, B ^a   Drake, P ^b   Oudinot, J ^b   Tahawi, H E L ^b   Rencz, M ^b   Popped, A ^c   Szekely, V ^c  

^a TIMA LABORATORY   (France)

^b MENTOR GRAPHICS CORPORATION   (United States)

^c TU Institute of Building Constructions and Sanitary Engineering Budapest   (Hungary)

Author keywords

Anisotropic etching; Cad tools; Hdl A; Mems; Microsystems; Modeling

Indexed keywords

ANISOTROPIC ETCHING; ANISOTROPY; MEMS; MICROMACHINING; MICROSYSTEMS; MODELS;

CAD TOOL; DESIGN AND SIMULATION; ENGINEERING TOOLS; HDL-A; HYBRID MICROSYSTEM; INTEGRATED ENVIRONMENT; LAYOUT GENERATORS; STANDARD COMPONENTS;

COMPUTER AIDED DESIGN;

EID: 17944362713     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.284556     Document Type: Conference Paper

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