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Volumn 11, Issue 1 I, 2001, Pages 357-360
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Y-Ba-Cu-O thin films on 3 inch sapphire wafers for microwave devices
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Author keywords
Microwave measurement technique; Superconducting devices; Surface resistance; YBCO films
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Indexed keywords
CERIUM COMPOUNDS;
CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY);
ELECTRIC RESISTANCE;
EPITAXIAL GROWTH;
ETCHING;
MICROWAVE DEVICES;
OXIDE SUPERCONDUCTORS;
PHOTOLITHOGRAPHY;
RESONATORS;
SAPPHIRE;
SPUTTER DEPOSITION;
YTTRIUM BARIUM COPPER OXIDES;
MICROSTRIP RESONATORS;
SAPPHIRE WAFER;
SURFACE RESISTANCE;
WET ETCHING;
SUPERCONDUCTING FILMS;
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EID: 17844391530
PISSN: 10518223
EISSN: None
Source Type: Journal
DOI: 10.1109/77.919356 Document Type: Conference Paper |
Times cited : (13)
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References (11)
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