Evolution of surface structures on Si(001) during hydrogen desorption

Applied Surface Science

Volumn 121-122, Issue , 1997, Pages 179-182

  Yoshimura, Masamichi ^a   Ueda, Kazuyuki ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Etching; Hydrogen; Scanning tunneling microscopy; Silicon; Surface defects; Surface diffusion

Indexed keywords

CRYSTAL DEFECTS; DESORPTION; DIFFUSION IN SOLIDS; ETCHING; HYDROGEN; SCANNING TUNNELING MICROSCOPY; SURFACE STRUCTURE; SURFACE TREATMENT;

SURFACE RECONSTRUCTION;

SEMICONDUCTING SILICON;

EID: 17744415596     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00283-3     Document Type: Article

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