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Volumn 113-114, Issue , 1997, Pages 244-248
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Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
CHEMICAL VAPOR DEPOSITION;
DIAMONDS;
FREE RADICALS;
MICROWAVES;
PLASMA APPLICATIONS;
SILICON;
SUBSTRATES;
BIAS VOLTAGE;
INFRARED LASER ABSORPTION SPECTROSCOPY;
NUCLEATION;
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EID: 17744413308
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(96)00815-X Document Type: Article |
Times cited : (6)
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References (11)
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