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Volumn 113-114, Issue , 1997, Pages 244-248

Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; DIAMONDS; FREE RADICALS; MICROWAVES; PLASMA APPLICATIONS; SILICON; SUBSTRATES;

EID: 17744413308     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00815-X     Document Type: Article
Times cited : (6)

References (11)
  • 10
    • 30244572562 scopus 로고
    • Doctoral thesis, Osaka University
    • T. Yara, Doctoral thesis, Osaka University, 1995.
    • (1995)
    • Yara, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.