Linear thermal expansion coefficients of amorphous and microcrystalline silicon films

Journal of Non-Crystalline Solids

Volumn 299-302, Issue , 2002, Pages 314-317

  Takimoto, K ^a   Fukuta, A ^a   Yamamoto, Y ^a   Yoshida, N ^a   Itoh, T ^a   Nonomura, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; HYDROGENATION; POLYSILICON; THERMAL EFFECTS; THERMAL EXPANSION;

LINEAR THERMAL EXPANSION COEFFICIENTS;

THIN FILMS;

EID: 17744403630     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(02)00930-4     Document Type: Article

References (3)