A new method to determine the tool count of a semiconductor factory using FabSim

Proceedings - Winter Simulation Conference

Volumn 2, Issue , 2004, Pages 1925-1929

  Vogt, Holger ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER PROGRAMMING LANGUAGES; COMPUTER SIMULATION; DATA PROCESSING; FUNCTIONS; INTEGER PROGRAMMING; OPTIMIZATION; SIMULATED ANNEALING; SYNCHRONIZATION; THROUGHPUT; VECTORS;

DISCRETE-EVENT SIMULATION MODELS; FABSIM; SIMULATIED ANNEALING ALGORITHMS; STOCHASTIC VARIATIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 17744390614     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Alrefaei, M. H., and S. Andradóttir. 1999. A Simulated Annealing Algorithm with Constant Temperature for Discrete Stochastic Optimization. Management Science 45 (5): 748-764.
2. Andradóttir, S. 1998. Simulation Optimization. In Handbook of simulation, ed. J. Banks, 326-328. New York: Wiley.
3. Grötker, T., S. Liao, G. Martin, and S. Swan. 2002. System design with SystemC. Boston, MA: Kluwer Academic Publishers.
4. Law, A. M., and W. D. Kelton. 2000. Simulation modeling and Analysis. Boston, MA: McGraw-Hill. 93-94.
5. Rose, O. 2003. Accelerating Products under Due-Date Oriented Dispatching Rules in Semiconductor Manufacturing. In Proceedings of the 2003 Winter Simulation Conference, ed. S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, 1346-1350. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers. Available online via [accessed February 2, 2004].
6. Vogt, H. 2003. Discrete-Event Simulation using SystemC: Interactive Semiconductor Factory Modeling with FabSim. In Proceedings of the 2003 Winter Simulation Conference, ed. S. Chick, P. J. Sánchez, D. Ferrin, and D. J. Morrice, 1383-1387. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers. Available online via [accessed February 2, 2004].