Variable angle spectroscopic ellipsometry in the vacuum ultraviolet

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4099, Issue , 2000, Pages 197-205

  Woollam, John A ^a   Hilfiker, James N ^a   Tiwald, Thomas E ^a   Bungay, Corey L ^a   Synowicki, Ron A ^a   Meyer, Duane E ^a   Herzinger, Craig M ^a   Pfeiffer, Galen L ^a   Cooney, Gerald T ^a   Green, Steven E ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MAXWELL EQUATIONS; MULTILAYERS; OPTICAL DATA STORAGE; OPTICAL FILMS; REFRACTIVE INDEX; SEMICONDUCTOR MATERIALS; SPECTRUM ANALYSIS; THIN FILMS; VACUUM;

DIELECTRIC FUNCTIONS; VACUUM ULTRAVIOLET;

ELLIPSOMETRY;

EID: 17744386708     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405820     Document Type: Conference Paper

References (29)