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Volumn 65, Issue 7, 2002, Pages 0732021-0732024
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First-principles investigation' of a-SiNx:H
a
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Author keywords
[No Author keywords available]
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Indexed keywords
HYDROGEN;
NITROGEN;
SILICON NITRIDE;
ARTICLE;
ATOM;
CALCULATION;
CHEMICAL COMPOSITION;
ELECTRICITY;
ELECTRON SPIN RESONANCE;
ELECTRONICS;
ENERGY;
HYDROGENATION;
SEMICONDUCTOR;
THEORY;
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EID: 17644442582
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (46)
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References (27)
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