Development of Ultra Thin Quartz by Abrasive Machining

Key Engineering Materials

Volumn 257-258, Issue , 2004, Pages 123-128

  Touge, M ^a   Watanabe, J ^a   Ohbuchi, Y ^a   Sakamoto, H ^a   Ueda, N ^a  

^a KUMAMOTO UNIVERSITY   (Japan)

Author keywords

Lapping; Polishing; Quartz; Ultra Thinning Process

Indexed keywords

ABRASIVES; BARIUM TITANATE; ELECTROPLATING; FABRICATION; LAPPING; MACHINING; OSCILLATORS (MECHANICAL); PRESSURE DISTRIBUTION; SURFACE ROUGHNESS;

ULTRA THIN QUARTZ; ULTRA-THINNING PROCESSES;

QUARTZ;

EID: 17644435781     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.257-258.123     Document Type: Article

References (3)

1. S. Sato: J. of Japan Society for Abrasive Technology, Vol. 41 (1997), p. 127.
2. R.A. Heising: Electric Industries Association, 1978, p.1.
3. P.P. Bowden and R.D. Tabor: The Friction and lubrication of Solid (1950).