A Study on Constant-Pressure Grinding with EPD Pellets

Key Engineering Materials

Volumn 257-258, Issue , 2004, Pages 135-138

  Yamamoto, Y ^a   Maeda, H ^a   Shibutani, H ^a   Suzuki, H ^b   Horiuchi, O ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b KOBE UNIVERSITY   (Japan)

Author keywords

Brittle Materials; Constant Pressures Processing; Dry Process; EPD; Grinding Wheel; Mirror Grinding; Silicon

Indexed keywords

APPROXIMATION THEORY; BRITTLENESS; GRINDING WHEELS; INTEGRATED CIRCUITS; MICROPROCESSOR CHIPS; ORE PELLETS; POLISHING; PRESSURE EFFECTS; SILICON WAFERS;

CONSTANT-PRESSURE PROCESSING; DRY PROCESSES; MIRROR GRINDING;

GRINDING (MACHINING);

EID: 17644431411     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (3)

1. N. Fuwa, H. Shibutani, O. Horiuchi, H. Suzuki and J. Ikeno: Proc. of ISAAT2001 - Advances in Abrasive Technology IV, 2001, p. 295.
2. T. Fukazawa, N. Fuwa, J. Ikeno, H. Shibutani, O. Horiuchi and H. Suzuki: Proc. of 10th ICPE - Initiatives of Precision Engineering at the Beginning of a Millennium, 2001, p. 366.
3. H. Shibutani, J. Ikeno, O. Horiuchi and K. Yano: Proc. of 9th ICPE - Precision Science and Technology for Perfect Surfaces, 1998, p. 98.