SMM actuator for nano-scale positioning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5602, Issue , 2004, Pages 218-225

  Hu, E T ^a,b   Huang, K Y ^a   Hwang, I S ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Actuator; Nanotechnology; Piezoelectric; Positioning; UHV

Indexed keywords

ELECTRIC POTENTIAL; NANOTECHNOLOGY; PIEZOELECTRIC DEVICES; POLARIZATION; SCANNING TUNNELING MICROSCOPY; SIGNAL PROCESSING; ULTRAHIGH VACUUM;

PIEZOELECTRICS; POSITIONING; SCANNING PROBE MICROSCOPY (SPM); STICK-SLIP-EFFECT;

ACTUATORS;

EID: 17644426672     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.570786     Document Type: Conference Paper

References (7)

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